Handling device for handling a measuring probe

专利摘要:
Handling device (50) for handling a probe (12) of a scanning probe microscope (81), wherein the probe (12) has a probe body (51) and a by means of a cantilever (52) coupled to the probe body (51) probe tip (85), the handling device (50) has a receiving device (53) for receiving the measuring probe (12) on a receiving surface (54), a guide structure (55) in which the measuring probe (12) can be guided while the probe body (51) is delimited at least partially and the cantilever (52) and the probe tip (85) are mounted without contact, and a transport device (56) for transporting the probe (12) from the receiving surface (54) along the guide structure (55) to a target surface (57).
公开号:AT520313A4
申请号:T50765/2017
申请日:2017-09-13
公开日:2019-03-15
发明作者:Ing Norbert Pinno-Rath Dipl；Gernot Leuprecht Dr；Daniel Koller Dr
申请人:Anton Paar Gmbh；
IPC主号:

专利说明:

Handling device for handling a probe
The invention relates to a handling device and a method for handling a measuring probe, as well as an arrangement with a handling device and a scanning probe microscope.
An atomic force microscope is mainly used for the lateral or vertical high-resolution examination of surfaces (in particular topographical investigations of surfaces). In this case, a measuring probe (for example comprising a leaf spring, which is also referred to as cantilever or cantilever) with a nanoscopic needle (also referred to as probe tip or probe tip) over the surface (ie screened) and the deflection of the cantilever, based on the Interaction of the cantilever with the surface, detected. Depending on the surface condition of the sample, the deflection of the cantilever is recorded or scanned depending on the position or the tracking of the probe. The deflection of the cantilever or the probe tip can be measured capacitively or piezoelectrically or by means of optical sensors. This method allows a structural analysis of the surface of the sample up to atomic resolution.
The cantilever arm (also called cantilever) used together with the probe or measuring tip is mounted on a typically a few mm2 cantilever chip, which is also referred to as a probe body. This probe body in turn is to be introduced into a recess provided for this purpose on a probe holder before a measurement with the scanning probe microscope. This activity is usually done manually and places high demands on the user to avoid damaging or losing the cantilever or probe tip.
Conventionally, manual methods are performed in which the probe body is inserted by means of tweezers in an open clamping mechanism and the mechanism is then closed again. This requires experience and skill on the part of the user.
In order to facilitate the user this assembly, the probe tip having probe body is pre-mounted on a holder in alternative solutions, which facilitates the handling and assembly (of the now larger component). Prefabricated modules of this type, however, are expensive in terms of apparatus. In addition, such a module does not provide sufficient flexibility in the exchange of a probe and makes a large logistical effort required, since a larger number of modules must be kept in stock. The difficulty of mounting the probe is merely shifted to one step before.
Conventionally, therefore, it is still a challenge to handle and, if necessary, replace a sensitive probe of a scanning probe microscope without requiring a user a great deal of dexterity or exposure to the danger of damage or destruction of the probe.
It is an object of the present invention to provide a way to handle a probe of a scanning probe microscope easily and damage protected.
This object is solved by the objects with the features according to the independent claims. Further embodiments are shown in the dependent claims.
According to an embodiment of the present invention, there is provided a handling apparatus for handling a probe of a scanning probe microscope, the probe having a probe body and a probe tip coupled to the probe body by a cantilever, the handling apparatus comprising a receptacle for receiving the probe on a receiving surface, a guide structure, in which the probe is feasible and the probe body is at least partially limited and the cantilever and the probe tip are mounted without contact, and a transport device for transporting the probe from the receiving surface along the guide structure to a target surface (in particular in a region of the target surface).
According to another embodiment of the present invention, there is provided an apparatus comprising a scanning probe microscope for detecting surface information regarding a specimen by scanning one surface of the specimen, the scanning probe microscope having a probe adapted to scan the surface of the specimen and a probe body and a probe tip coupled to the probe body by means of a cantilever and having a handling device with the above-described features for handling the probe.
In accordance with another exemplary embodiment, there is provided a method of manipulating a probe for a scanning probe microscope, the probe comprising a probe body and a probe tip coupled to the probe body by a cantilever, wherein in the method the probe is received on a receiving surface of a handling device, the probe is guided in the handling device such that the probe body is at least partially bounded by a guide structure and the cantilever and the probe tip are stored without contact in the guide structure, and the probe is transported in the handling device of the receiving surface along the guide structure to a target surface.
In the context of the present application, the term "handling device" is understood to mean, in particular, a tool or auxiliary device with which a probe with a sensitive probe tip can be handled by a user and the probe is mounted on a probe receptacle of a scanning probe microscope in front of an actual probe The handling device can be provided separately from the scanning probe microscope, Alternatively, the handling device can also be fixedly connected to the scanning probe microscope.
In the context of the present application, the term "scanning probe microscope" is understood to mean, in particular, a microscope in which an image or other surface information of a test specimen is not generated with an optical or electron-optical imaging (ie using lenses), but via the interaction of a measuring probe The sample surface to be examined is scanned point by point in a raster process by means of this measuring probe, and the measured values resulting for each individual point can then be combined into an image or evaluated in another way.
In accordance with an exemplary embodiment of the invention, a tool-designed handling device is provided that allows a user to prepare a probe with a sensitive probe tip for mounting to a scanning probe microscope. During appropriate manipulation of the probe by the user using the handler, the sensitive probe tip is consistently and reliably protected from damage. At the same time, a user is not required to have delicate handles or special experience or skill. Rather, it is sufficient if a user deposits the probe together with the probe tip only on a receiving surface and then actuates the handling device, whereby the deposited probe is automatically transported from the receiving surface along a guide structure to a target surface. When covering this path, the probe tip remains contact-free in the handling device, with a corresponding transport device acting on the less sensitive probe body of the measuring probe for moving the measuring probe. At the target area or in the area of
Destination surface arrived in a defined and desired manner, the prepared for coupling to the scanning probe microscope probe can be further treated by removing a target module containing the transport module from the handling device. Transport module including the probe at the target surface can then be moved to the scanning probe microscope, where the assembly of the transport module can be completed together with the probe on the scanning probe microscope. In this way, an intuitively and without any special prior knowledge or skill operable handling mechanism for easy and safe replacement of a probe is created, which can be operated by untrained users and reliably avoids damage to the cantilever and the probe tip to the probe body of the probe.
In the following, additional exemplary embodiments of the handling device, the arrangement and the method will be described.
According to one exemplary embodiment of the invention, the handling device may have a covering device for placing it on the receiving device for covering the measuring probe. Such a covering device may have a cover which also protects the measuring probe from damage on the upper side and optionally laterally. If a user has placed the measuring probe on the receiving surface and put on the covering device, no further user activity is required directly on the isolated measuring probe itself in order to mount it on the scanning probe microscope.
According to one exemplary embodiment of the invention, the guide structure may have a channel at least in sections between the receiving surface and the target surface, along which channel the measuring probe can be guided. Such a channel may be delimited as a groove, recess or sidewalls, and may precisely define the trajectory along which the probe travels from the receiving surface to the substrate during transport
Target area moves. As a result, even the sensitive probe tip can be handled quickly, reliably and safely during transport.
According to one embodiment of the invention, the channel can be delimited by means of top and / or bottom and / or side walls. In one embodiment, a channel spatially delimited on four sides, the probe tip is fully and therefore particularly reliably protected against undesired mechanical damage.
According to one exemplary embodiment of the invention, the wall facing the probe tip may have an open position for the contactless release of the arm and the probe tip. The measuring probe can be guided in the guide structure in such a way that the probe tip pointing upwards, for example, at the end of the boom always remains objected to by the surrounding walls and is thus continuously guided without contact during transportation.
According to an embodiment of the invention, the transport device for transporting the measuring probe from the target surface along the guide structure back to the receiving surface may be formed. The guide structure and transport device can thus be configured such that not only is it possible to move the measuring probe from the receiving surface to the target surface for mounting the probe body to the scanning probe microscope, but also after completion of a measurement using the measuring probe on the scanning probe microscope, the measuring probe also without complicated handling can be dismantled by a user again. This can take place in that after completion of such a measurement, the transport module together with the probe is returned from the scanning probe microscope back to the handling device, coupled there and the probe can be transported in inverse direction from the target surface along the guide structure to the receiving surface. Due to such bidirectional handling, a user merely needs to remove the measuring probe from the receiving surface at the end.
According to one exemplary embodiment of the invention, the transport device can have a feed slide for pushing the measuring probe at least in sections from the receiving surface to the target surface. Clearly, the entire measuring probe can be pushed from the rear along the guide structure to the target surface with the feed slider. Therefore, a single intuitive hand movement of a user is sufficient to move the probe from the receiving surface to the target surface or into the area of the target surface.
According to one exemplary embodiment of the invention, the feed slide can have an open position for the free release of the jib and the probe tip when the measuring probe is pushed at least in sections from the receiving surface to the target surface by means of the feed slide. In order to protect the measuring probe from mechanical damage particularly reliably, it can be inserted in such a way that, during the transport from the receiving surface to the target surface, the boom together with the probe tip lies at a position which is rearward in the transport direction. While the feed slide pushes the probe forward and engages the back of the probe (relative to the transport direction), the described release ensures that the boom and probe tip are not in contact with the surrounding components despite the handling of the entire probe by the feed slide the handling device passes and is even additionally protected during transport by the feed slide.
According to one embodiment of the invention, the transport device may have a discharge slide for pushing the measuring probe at least in sections from the target surface back to the receiving surface. When the measuring probe is transported back from the target area to the receiving area, the measuring probe can be inverse in comparison to the forward transport
Be transported direction and thereby pushed or dragged by means of the discharge slide again. When transporting, the Abführschieber can serve as the front boundary of the probe, whereas the return slide the feed slide acts as a back boundary of the probe. Feeder and Abführschieber thus both fulfill a dual function, namely a displacement of the probe in an operating condition and a spatial limitation of the probe in the other operating state.
According to one embodiment of the invention, the Abführschieber for contact-type exposure may be formed only on the probe body of the measuring probe when the measuring probe is at least partially pushed by the Abführschiebers from the target surface to the receiving surface. Advantageously, a sliding of the probe by means of the Abführschiebers to any mechanical load from boom together with probe tip, since the Abführschieber acts according to the described embodiment only on the probe body.
According to one embodiment of the invention, the Abführschieber may be formed as a spring tongue. Such a spring tongue can be an elastic component or solid-state joint, which can ensure handling of the probe body with only little force. This also contributes to the design of the Abführschiebers as a spring tongue to Verunmöglichen a mechanical damage or destruction of the probe during handling.
According to one embodiment of the invention, the Abführschieber may have a hook acting on the probe during displacement and a coupled with the hook and immersed in moving into a recess clearance nose, which is led out on reaching the receiving surface by the probe due to the displacement of the recess the hook releases the probe. A preferably trained as a spring tongue Abführschieber can thus have a hook for carrying the probe body, when the handling device for transporting the
Probe is actuated from the target surface back to the receiving surface. Advantageously, a flexible tongue according to an exemplary embodiment, in addition to the hook, for example, have a release nose arranged, for example, in a groove or other recess, while the hook pushes or pulls the probe back towards the receiving surface. By appropriate configuration of the recess of the hook can be forced to an upward movement when the probe has reached in the range of a desired end position, thus at the receiving surface. Release lug and hooks can be connected to each other such that upon movement of the release lug out of the recess and the hook is also moved up and therefore disengaged from the probe. The measuring probe is then no longer pushed or pulled and remains at the desired end position, for example the receiving surface.
According to one embodiment of the invention, the Abführschieber may be formed perpendicular to a sliding direction narrower than the feed slide. As a result of this particularly narrow design of the discharge slide, the guidance of the release nose in the groove or other depression can on the one hand be made very space-saving and on the other hand with a precisely defined spatial guidance.
According to an embodiment of the invention, the handling device may comprise an actuating device for actuating the transport device by a user. For example, such an actuator may first be actuated by a user (for example, by keystroke) before the transport is longitudinally displaced by the user, thereby automatically moving the probe between the receiving surface and the target surface. Such an actuator is intuitively and error-robust operated by a user. Alternatively or additionally, the actuating device can also for
Actuation by a drive device, in particular a motor, be formed.
According to one embodiment of the invention, the actuating device may have a force limiting mechanism for limiting a force exerted on the actuating device by a user in such a way that a force acting on the transport device does not exceed a predefinable threshold value. Advantageously, a provision can be created in the actuator, which limits the transmission of a force exerted by a user on the probe to a predetermined maximum value. Thereby, even when an excessive force is exerted by a user, it can be reliably prevented that the measuring probe will be affected. A corresponding force limiting mechanism can, for example, cause a force decoupling between the actuating device and the measuring probe when the actuating force exceeds a predefinable threshold value. This can be accomplished by providing a corresponding clutch between actuator and transport.
According to one embodiment of the invention, the actuating device may be designed such that a displacement of the transport device by means of actuating the actuating device selectively enables or impossible. For example, the actuator may be transitioned between a locked state and an unlocked state by a user actuating the actuator (eg, to operate a button prior to a translational movement). Even in an unlocked state, a displacement of the transport device by a corresponding safety mechanism can be made impossible if at such a displacement damage to the probe would be to be feared. An example of a corresponding safety mechanism is shown in FIG.
According to one exemplary embodiment of the invention, the handling device can have a transport module having the target surface, which, in particular together with a measuring probe on the target surface, can be separated from the rest of the handling device and can be transported or coupled to the scanning probe microscope. The transport module may be selectively attached to the handling device or attached to the scanning probe microscope. If the transport module is attached to the handling device, a transfer of the measuring probe between receiving surface and target surface can take place. When the transport module is attached to the scanning probe microscope, the probe can be used to scan a surface of a sample body in a scanning manner. The transport module itself can carry the measuring probe on its target surface and, since it is dimensioned substantially larger than the measuring probe, can be easily handled by a user.
According to an embodiment of the invention, the handling device may comprise a movable (for example displaceable) ramp and a movable (for example pivotable) guide part, which can be moved to the transport module in an operating state for engaging the transport module. Guide part and ramp can be moved away from the transport module in another operating state and the transport module releasing. In this way, the transport module can be coupled in a defined manner to the handling device or can be decoupled from this for transfer to the scanning probe microscope.
According to an embodiment of the invention, the receiving surface may be arranged upon engagement of the transport module between the ramp and the guide member. In a corresponding manner, the target surface can be arranged when the transport module is engaged between the transport module and the guide part. The transport device can thus be set up when transferring the measuring probe from the receiving surface to the target surface
Move the probe from one position between the ramp and the guide to a different position between the guide and the transport module.
According to an embodiment of the invention, the handling device may have a fixing device for selectively fixing the measuring probe to the target surface. In a preferred embodiment, the handling device can be equipped with a fixing mechanism which fixes the measuring probe to the target surface before or during removal of the transport module from the handling device. In other words, the handling device can make it possible to insert a probe with a cantilever and a probe tip (also referred to as a cantilever chip with a cantilever) into a fixing mechanism and fix it there. In this way it can be made possible that during a transport of the measuring probe to the transport module from the handling device to the scanning probe microscope, the measuring probe is reliably secured to the transport module.
According to an exemplary embodiment of the invention, the fixing device may have a first fixing component in the region of the target surface and a second fixing component which can be selectively moved toward the target surface or switched from the target surface to switch between a state of the measuring probe detached from the target surface and a state of the measuring probe fixed to the target surface Target surface is designed wegbewegbar. The first fixing component and the second fixing component can thus cooperate in such a way that with a spatially approximated relative state between the two Fixierkomponenten compared to a spatially further apart relative state of the two Fixierkomponenten due to, for example, a distance-dependent interaction force between the Fixierkomponenten selectively held the probe or can be released.
According to one exemplary embodiment of the invention, the fixing device can be set up to switch on the state of the measuring probe released from the target surface by means of the movement of the second fixing component. In a corresponding manner, the fixing device can be set up to switch on the state of the measuring probe fixed to the target surface by moving away the second fixing component. The moving away of the second fixing component can advantageously take place for releasing the transport module, since after release of the transport module, the measuring probe arranged thereon should preferably be held firmly on the transport module for transport to the scanning probe microscope. Clearly, a fastening force acting on the measuring probe can be switched on by the second fixing component being moved away from the first fixing component. When the second fixing component is moved up to the first fixing component, the release of the measuring probe to the target surface can advantageously be achieved. The transport module can then be attached to the handling device to move the now released probe from the target surface to the receiving surface, or vice versa.
According to an embodiment of the invention, the fixing device may include a master force device (which may be attached to the second fixation component or form the second fixation component) for selectively applying a master force to a fixation mechanism (which may be attached to the first fixation component or form the first fixation component). , And this fixing mechanism, which is actuated by means of the master power device for releasing and / or fixing the transported to the target position measuring probe. In the context of the present application, the term "master power device" is understood to mean, in particular, a force generating device which is designed to generate a temporarily acting master force as required (for example, machine-controlled or user-controlled.) This can be a non-contact and therefore easily reproducible attachment of the measuring probe The measuring probe can also be switched on or off from the target surface (at which also an insertion device, for example an insertion pocket, can be provided for insertion of the measuring probe.) According to the exemplary embodiment described, a robust fixing device for a measuring probe is one Scanning probe microscope is provided, which can be used simultaneously for many different types of measuring probes or measuring methods in the scanning probe microscope and the probe makes non-destructive interchangeable An embodiment of the invention allows the user to safely, easily and intuitively exchange the probe. This increases user comfort in connection with the assembly and replacement of a measuring probe. The interaction of an intuitively manageable insertion device, a reversible-acting fixing mechanism and a preferably non-contact master power device for force-based control of the fixing mechanism, the handling of the probe can be simplified, unwanted mechanical destruction of the probe can be prevented and can be excluded misplacement of the probe. For this purpose, embodiments of the invention make the operating principle to own, that is acted upon by a master power of the fixing mechanism for switching on and / or off a fixing force with a higher master force, under the influence of which the probe can be selectively fixed by the fixing mechanism or released therefrom. The master force generated by means of the master power device can thereby be superimposed on a fixing force of the fixing mechanism (in particular superimposed on it in a debilitating or even eliminating manner) so that no resultant fastening force acts on the measuring probe and the measuring probe is thus released.
According to one embodiment of the invention, the master power device may be selected from a group consisting of a master power device for exerting a magnetic master force (in particular applicable by means of a movable master force permanent magnet or by means of an electrically activatable
Masterkraftelektromagneten), a master hydraulic force, a pneumatic master power, a master electric power, a thermal master power and a mechanical master power. All of these force-generating mechanisms can be implemented in terms of control, so that the effect of excessive or insufficient fastening force can be advantageously avoided.
According to one exemplary embodiment of the invention, the fixing mechanism or the first fixing component may have at least two magnetic elements whose magnetic interaction force is designed to fix the measuring probe transported to the target surface, in particular to fix it in a clamping manner. If one of the two magnetic elements (for example, in a recess of a housing or a fixing) is immobilized and the other of the two magnetic elements can move freely (for example, in the recess of the housing or fixing body), so by the magnetic interaction of the two magnetic elements Force can be generated, which acts on the attached to the target surface (in particular introduced into the insertion) measuring probe acts. In order to be able to remove the measuring probe from the target surface (in particular to be removed from the insertion device), a further magnetic field generating device (for example a movable permanent magnet or an electromagnet) can be used as an associated master force device, which superimposes a superordinate magnetic force on the already acting magnetic forces directly or indirectly on the probe acting on the magnetic elements is released with release of the probe.
According to one exemplary embodiment of the invention, the fixing device may have a retaining force reinforcing element (in particular a ball) with a curved, in particular spherically curved, adhesive force transfer surface which acts directly on the measuring probe in a state of the measuring probe transported to the target surface by means of the adhesive force transfer surface. This has the advantage that the force acting on the measuring probe via the adhesion force enhancing element can be substantially punctiform, so that the fixing force exerted by the fixing mechanism can act on the measuring probe in a positionally accurate and spatially highly concentrated or focused action.
According to one exemplary embodiment of the invention, the transport device and the fixing device can be set up to cooperate with one another such that the measuring probe is initially transported to the target surface (by means of the transport device) and fixed on the target surface (in particular pressed thereon) by fixing (using the fixing device) is attracted to or sucked on this). The transport device can first move the measuring probe longitudinally while approaching the target surface so that the measuring probe comes to rest in the area of the target surface. Actual pressing (or the like) of the measuring probe in physical contact with the target surface can then take place by a movement in a direction different from the longitudinal displacement direction (in particular substantially orthogonal) direction by the fixing device, which the measuring probe against the target surface to a contact body (in particular to a contact plate or the like) presses or otherwise fixed there. Thus, according to the embodiment described, a two-step movement of the measuring probe on its way from contact contact with the receiving surface may lead to contact contact with the target surface. This mechanism can be carried out particularly precisely with advantage.
Alternatively, the movement from the receiving surface to the target surface, but also be accomplished only by the transport device alone.
According to one exemplary embodiment of the invention, the handling device can have an insertion pocket or insertion device, which is partially bounded by the target surface, into which the measuring probe is at least partially inserted when the measuring probe rests on the target surface. The insertion pocket or insertion device may be delimited on one side of the target surface on a contact body (for example, a contact plate, in particular a contact plate). For example, the target surface may act on the probe against a fixing force and press the probe against the contact body or against the target surface. On the part of the contact body, if necessary, a master force can act, which can counteract, for example, the fixing force for releasing the probe.
According to an embodiment of the invention, the receiving surface and / or a guide surface (for example a bottom surface of the channel) of the guide structure and / or the target surface may be formed as a surface inclined relative to a horizontal plane. In particular, this inclination may be such that the measuring probe moves downwards along the inclined surface at least in sections during transportation from the receiving surface to or into a region of the target surface. During the movement from the receiving surface to the target surface, the measuring probe can clearly slide down an inclined plane, so that the installation of the measuring probe in the transport module takes place at an angle corresponding to the final target position of the measuring probe in the transport module and subsequently in the atomic force microscope.
In particular, according to an exemplary embodiment, a handling device may have a displaceable ramp, preferably with a sloping surface. On this preferably inclined or inclined surface, the measuring probe or the cantilever chip, preferably with the probe tip up, comes to rest. The associated probe body can be inserted by means of a carriage along the inclined plane (clearly downhill) into the transport module (which can also be referred to as a cantilever holder or cantilever module). Conversely, a previously used in a scanning probe microscope probe can be pulled out of the transport module with this carriage and a spring tongue attached thereto. During these movements, the probe can be controlled and defined. Corresponding recesses, which can be provided on the guide structure or the transport device according to exemplary embodiments of the invention, can ensure that the cantilever and the probe tip of the measuring probe are not damaged.
According to one embodiment of the invention, the handling device may include a locking mechanism for preventing movement of a component (or a plurality of components relative to one another, for example ramp relative to slide) of the handling device, which movement involves the boom and / or the probe tip and / or the insertion pocket would apply a mechanical load. For example, if a carriage has guided the probe toward the target surface, moving the ramp in an opposite direction may result in undesirable movement of a hook of a scraper over the probe, damaging the latter. By a corresponding locking mechanism, this can be prevented.
According to one exemplary embodiment of the invention, the scanning probe microscope can have a transport module interface for coupling a transport module with the features described above such that after coupling the transport module (with a measuring probe arranged on its target surface, in particular fixed thereto) to the transport module interface, the measuring probe the transport module is ready for scanning scanning the surface of the specimen. Thus, if the measuring probe has been arranged and preferably fixed on the transport module by appropriate handling of the handling device, a user can apply the transport module together with the measuring probe to the scanning probe microscope. As a result, the measuring probe can preferably be moved directly into a measuring position.
According to one exemplary embodiment of the invention, after transporting the measuring probe to the target surface, the method may include separating the transport module including the measuring probe from the remainder of the handling device, and coupling the transport module together with the measuring probe located at the target surface to the scanning probe microscope. For this purpose, a user can move the measuring probe arranged on the transport module and preferably fixed thereto to the scanning probe microscope and couple it there. After coupling, the method may preferably include operating the scanning probe microscope to determine surface information regarding a test specimen by means of a scanning scanning of a surface of the specimen by means of the measuring probe. Furthermore, in one exemplary embodiment, after determining the surface information of the test specimen, the method may include separating the transport module together with the measuring probe from the scanning probe microscope, and then reconnecting the transport module together with the measuring probe to the handling device. Thereafter, in the method, the measuring probe on the transport module in the handling device can be moved from the target surface along the guide structure back to the receiving surface. There, a user can remove the probe from the receiving surface (for example with tweezers). In this way, the handling device can support both the mounting of the probe to the scanning probe microscope and the dismantling of the probe from the scanning probe microscope.
According to one exemplary embodiment of the invention, the scanning probe microscope can be designed as an atomic force microscope. The Atomic Force Microscope, also called Atomic Force Microscope or Atomic Force Microscope (AFM), is a special scanning probe microscope. It serves as a tool in surface chemistry and is used for mechanical scanning of surfaces and the measurement of atomic forces on the nanometer scale.
Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the following figures.
FIG. 1 shows an arrangement with a handling device for handling a measuring probe and an associated scanning probe microscope according to an exemplary embodiment of the invention.
FIG. 2 shows a side view of a measuring probe with a probe body, a probe tip and a boom arranged therebetween according to an exemplary embodiment of the invention.
FIG. 3 shows a plan view of the measuring probe according to FIG. 2.
FIG. 4 shows a schematic side view of a handling device according to an exemplary embodiment of the invention.
FIG. 4A shows a detail A according to FIG. 4.
FIG. 4B shows a detail Al according to FIG. 4A.
FIG. 4C shows a detail Al according to FIG. 4A in a different operating state of the handling device compared to FIG. 4B.
Figure 5 shows a portion of a handling device according to an exemplary embodiment of the invention.
FIG. 6 shows another partial area of a handling device according to an exemplary embodiment of the invention.
FIG. 7 shows a detail of FIG. 6.
Figure 8 shows a portion of a handling device according to another exemplary embodiment of the invention.
FIG. 9 shows a cross section of a guide structure of a handling device according to an exemplary embodiment of the invention.
FIG. 10 shows a plan view of the guide structure according to FIG. 9.
FIG. 11 shows a side view of a guide structure with a measuring probe guided therein of a handling device according to an exemplary embodiment of the invention.
FIG. 12 shows a top view of the guide structure together with the measuring probe according to FIG. 11.
FIG. 13 shows a receiving surface together with a measuring probe and a covering device of a handling device according to an exemplary embodiment of the invention.
FIG. 14 shows a partial region of the handling device according to FIG. 9.
Figure 15 shows a force limiting mechanism of an actuator of a handling device according to an exemplary embodiment of the invention.
FIG. 16 shows a handling device according to an exemplary embodiment of the invention with a protective mechanism against destruction of a measuring probe.
FIGS. 17 to 20 show a handling device according to an exemplary embodiment of the invention in different operating states while carrying out a method for handling a measuring probe of a scanning probe microscope by means of the handling device shown.
The same or similar components in different figures are provided with the same reference numerals.
Before describing exemplary embodiments of the invention with reference to the figures, a few general aspects of the invention and the underlying technologies will be explained: For a measurement with a scanning probe microscope, conventionally a measuring probe (for example a cantilever chip in the size of 1.6 mm x 3.4 mm) by means of tweezers into a dedicated probe holder (also referred to as cantilever holder) to introduce. Thus, the exchange of a probe from the user's point of view is a fine motor challenge, which can lead to damage of the probe and / or the probe recording in case of improper handling.
Conventionally, there is only a complex and moderately intuitive procedure for changing a probe, which is connected due to the fine motor manipulation using tweezers for inexperienced users with high error rate. There is a risk that the probe and / or parts of a scanner unit of a scanning probe microscope can be damaged.
According to an exemplary embodiment of the invention, a handling device for a controlled measurement probe exchange is provided. In particular, this allows a simplified, safer, reproducible and at the same time faster exchange of measuring probe with the aid of a tool as a handling device for a controlled loading and unloading of measuring probes.
FIG. 1 shows an arrangement 71 with a handling device 50 for handling a measuring probe 12 and an associated scanning probe microscope 81 according to an exemplary embodiment of the invention. In particular, Figure 1 illustrates a scanning probe microscope 81 according to an exemplary embodiment of the invention, which is formed as an atomic force microscope (AFM).
In the scanning probe microscope 81, a cantilever deflection, i. a change in position or a change in shape of a measuring probe 12 shown in more detail in Figure 2 and Figure 3 detected by means of an optical sensor. The measuring probe 12 has a probe body 51 and a probe tip 85 connected to the probe body 51 by means of a cantilever 52. In this case, an electromagnetic radiation source 82 (for example a laser source) transmits an electromagnetic primary beam 93 (in particular a light beam) to the measuring probe 12 via a focusing device 92 (which may be an array of one or more optical lenses) secondary electromagnetic beam 83 propagates to a photo- and position-sensitive detector 90 (in particular, the secondary electromagnetic beam 83 can be deflected by means of a deflecting mirror 94 or another optical deflecting element onto the position-sensitive detector 90). If the measuring probe 12 is brought into motion via an actuator 84 (which can effect a change in position in the vertical z-direction according to FIG. 1) and / or if the measuring probe 12 changes its shape, a change in the laser light can be detected at the position-sensitive detector 90. Depending on the interaction of the measuring tip 85 (also referred to as cantilever tip) of the measuring probe 12 with a sample body 86 to be examined or characterized, the deflection of the measuring probe 12 will vary and an associated region at the detector 90 will be hit by the electromagnetic secondary beam 83. The detector signal can then be processed in an evaluation unit 88. The resulting high-resolution image of the surface of the sample body 86 can then be displayed by means of a display device 89. A surface of the sample body 86 may be scanned with the measuring tip 85 (i.e., a sensitive tip of the measuring probe 12). A sample stage 97 is movable by means of actuators 98 in the horizontal plane (i.e., in an orthogonal to the z-axis x-direction and y-direction) in the horizontal plane according to FIG. The scanning probe microscope 81 thus serves to determine surface information regarding the specimen 86 by means of scanning scanning of a surface of the specimen 86 by means of the measuring probe 12.
The arrangement 71 shown in FIG. 1, apart from the scanning probe microscope 81, also has the handling device 50 for handling the measuring probe 12. The handling device 50 serves as a tool provided here separately from the scanning probe microscope 81 in order to enable a user to handle and mount the measuring probe 12 on the scanning probe microscope 81. For this purpose, as described with reference to FIG. 4 to FIG. 20, the measuring probe 12 is first fastened to a transport module 1 by means of the handling device 50. Then, the transport module 1 together with the measuring probe 12 is removed from the handling device 50 and coupled to the scanning probe microscope 81. The latter is shown schematically in Figure 1: The scanning probe microscope 81 has a
Transport module interface 72 for coupling the transport module 1, so that after coupling the transport module 1 to the transport module interface 72 of the scanning probe microscope 81, the probe 12 on the transport module 1 is ready for raster scanning the surface of the specimen 86.
Figure 2 shows a side view of the probe 12 with its plate-shaped probe body 51, its point-shaped probe tip 85 and its interposed and designed as a flexible arm cantilever 52. Figure 3 shows a plan view of the probe 12 according to Figure 2. In Figure 2 and Figure 3 are a Top 100, a bottom 101, a front 102, a back 103 and side surfaces 104 of the probe 12 shown. The front side 102 comprises the vertical surface 133 shown on the right side of the measuring probe 12 and the two adjacent chamfers 135, 137. The rear side 103 comprises the vertical surface 143 shown on the left side of the measuring probe 12 and the two adjacent chamfers 145, 147. The probe body 51 is a flat plate with a length and a width in the range of typically a few millimeters. The boom 52 has a width of, for example, a few micrometers. The probe tip 85 has dimensions that are in the range of those of the cantilever 52 or below.
FIG. 4 shows a schematic side view of a handling device 50 according to an exemplary embodiment of the invention. FIG. 4A shows a detail A according to FIG. 4. FIG. 4B shows a detail A1 according to FIG. 4A. FIG. 4C shows the detail A1 according to FIG. 4A in a different operating state of the handling device 50 compared with FIG. 4B. FIG. 4C illustrates the situation when removing the measuring probe 12 previously arranged on the transport module 1 from the transport module 1, in which a force acts on the measuring probe 12 a position 106 takes place. In contrast, Figure 4B shows the situation when inserting the probe 12 in the transport module 1, in which a force is applied to the measuring probe 12 at a position 105. Figure 5 shows a portion of the detail A shown in Figure 4A. Figure 6 shows another portion of the handling device 50. Figure 7 shows a detail of Figure 6 in two different operating states of a discharge gate 63 (dashed and solid lines). FIG. 8 shows a partial area of a handling device 50 according to another exemplary embodiment of the invention and illustrates, with manual operation, a force transmission from a user to the handling device 50. FIG. 9 shows a cross section of a guiding structure 55 of a handling device 50 according to an exemplary embodiment of the invention. FIG. 10 shows a top view of the guide structure 55 according to FIG. 9. FIG. 11 shows a side view of a guide structure 55 with a measuring probe 12 guided therein of a handling device 50 according to an exemplary embodiment of the invention. FIG. 12 shows a plan view of the guide structure 55 together with the measuring probe 12 according to FIG. 11. FIG. 13 shows a receiving surface 54 together with a measuring probe 12 and a covering device 58 of a handling device 50 according to an exemplary embodiment of the invention. FIG. 14 shows a partial region of the handling device 50 according to FIG. 8. FIG. 15 illustrates a force limiting mechanism 65 of an actuating device 6 of a handling device 50 according to an exemplary embodiment of the invention. FIG. 16 shows a portion of a handling device 50 according to an exemplary embodiment of the invention with a locking mechanism 70 which protects the measuring probe 12 from mechanical damage or destruction.
The overview device 4 illustrated in FIG. 4 serves to handle the measuring probe 12 of the scanning probe microscope 81 illustrated in FIG. 2 and FIG. 3
As can best be seen in FIG. 13, the handling device 50 has a receiving device 53 for receiving the measuring probe 12 on a receiving surface 54. A user places (for example by means of tweezers, not shown), the probe 12 to the
Receiving surface 54 and then covers it with a cover-like cover 58 for placement on the receiving device 53 from.
By means of a guide structure 55 shown in FIG. 9 to FIG. 12, the measuring probe 12 can be guided from the receiving surface 54 to a target surface 57 of a transport module 1 shown in FIG. 6 and FIG. In the guided movement of the measuring probe 12 along the guide structure 55, the probe body 51 may be circumferentially bounded by walls 60 and sliders 62, 63 and the cantilever 52 and the probe tip 85 may be mounted without contact. As a result, precise and reliable guidance is combined with a damage-free handling of the measuring probe 12. For this purpose, the guide structure 55 has an elongate channel 59, which may be at least partially formed as part of a ramp 3 and extending between the receiving surface 54 and the target surface 57. During its transport between the receiving surface 54 and the target surface 57, the measuring probe 12 is guided defined along the channel 59. FIGS. 9 to 12 show how the channel 59 is delimited by means of upper, lower and lateral walls 60. The measuring probe 12 is arranged in the channel 59 with a certain play or distance to the walls 60 and nevertheless can be precisely guided along its extent. Figure 9 shows that the top wall 60 has a release 61 for non-contact release of the boom 52 and the probe tip 85 to protect it from mechanical damage during the guidance along the channel 59. With the channel geometry according to FIG. 9 to FIG. 12, the measuring probe 12 can be kept completely under control without the need for a maximum accuracy with regard to guidance.
A transport device 56, which can best be seen in FIGS. 11 and 12, serves to transport the measuring probe 12 from the receiving surface 54 along the guide structure 55 to the target surface 57 or back from the target surface 57 to the receiving surface 54.
In order to accomplish the transport from the receiving surface 54 to the target surface 57, the transporting device 56 has a feeding slide 62 for pushing the measuring probe 12 from the receiving surface 54 to the target surface 57 (see FIGS. 4A to 4C and FIGS. 11 and 12). A corresponding sliding direction of the feed slide 62 is shown in FIG. 4B and FIG. 12 with reference numeral 107. Advantageously, the feed slider 62 has an exemption 61 to be recognized in FIG. 12 for the contactless release of the jib 52 and the probe tip 85. While the feed slide 62 pushes the measuring probe 12 in the direction of movement 107 towards the target surface 57, it engages the front side 102 of the measuring probe 12. Meanwhile, neither the boom 52 nor the probe tip 85 is touched by the feeding slider 62 because, when pushed, both remain in the clearance 61 at a distance from the feeding slider 62. This spacing is maintained throughout the displacement of the probe 12 by means of the feed slider 62 from the receiving surface 54 to the target surface 57.
In order to accomplish the pushing or pulling of the measuring probe 12 from the target surface 57 back to the receiving surface 54, the conveying device 56 has an evacuation slide 63 shown in FIGS. 4A to 4C, 6, 7 and 11 and 12. The Abführschieber 63 may be formed as a solid-body joint, which advantageously exerts only a small force on the measuring probe 12 during operation and therefore reliably avoids damage thereof. A corresponding (to sliding direction 107 alternative and opposite) sliding direction of the Abführschiebers 63 is shown in Figure 4C and Figure 12 with reference numeral 108. The Abführschieber 63 is designed to act only on the probe body 51 of the measuring probe 12 and attacks for this purpose exclusively on the back 103 of the probe body 51 at. Clearly pulls the Abführschieber 63, the probe 12 from the target surface 57 back to the receiving surface 54. Advantageously, the Abführschieber 63 can be formed as a spring tongue. For this purpose, the Abführschieber 63 acting on the measuring probe 12 when moving
Hook 5 'and a release lug 5 "operatively coupled to the hook 5' and immersed in a recess 64 when moving. This can best be seen in Figure 7. When the probe 12 reaches the receiving surface 54 as a result of displacement in the sliding direction 108, the release lug becomes 5 "out of the recess 64, whereby the hook 5 'inevitably releases the probe 12. The discharge slide 63 is narrower in a direction of extent perpendicular to a sliding direction 107, 108 than the feed slide 62, see FIG. 12.
An actuator 6 of the handling device 50 serves to actuate the discharge gate 63. By moving a carriage 4, the transport device 56 (more precisely its slide 62, 63) is moved by a user. As can be seen in FIG. 8 and FIG. 15, the actuating device 6 may have a force limiting mechanism 65 for limiting a force exerted on the actuating device 6 by a user such that a force acting on the transport device 56 does not exceed a predefinable threshold value. By means of the actuating device 6, in particular the discharge slide 63 can be actuated. Thus, a user also acts on the sensitive measuring probe 12 by means of the actuating device 6. In order to prevent an unintentional and undesired excessive force transmission from the user to the measuring probe 12 mechanically, a corresponding force decoupling can be implemented at excessive actuating forces, for example, by means of a spring member and coupling, shown schematically in FIGS. 8 and 15.
Furthermore, the handling device 50 has a fixing device 66, which can best be seen in FIG. 5, for selectively fixing the measuring probe 12 to the target surface 57, as will be described in more detail below. The fixing device 66 includes a lower-side first fixing component 67 in the region of or in operative connection with the target surface 57. The first fixing component 67 may be formed as part of the transport module 1. An upper-side second fixing component 68 may be formed as part of guide member 7 (as described below) by the transport module 1 using a hinge (see reference numeral 8) can be folded or - as shown in Figure 4A - folded onto the transport module 1 can be. Thus, the two fixing components 67, 68 are common and dependent on the folded state of the guide member 7 for switching between a state of the probe 12 fixed to the target surface 57 and a state of the probe 12 (see Fig. 5) detached from the target surface 57, selectively to the target surface 57 movable relative to each other or movable away from the target surface 57. Thus, the fixing device 66 is configured to turn on the state of the measuring probe 12 released from the target surface 57 by moving the second fixing component 68, or to turn on the measuring probe 12 fixed to the target surface 57 by moving away the second fixing component 68. For this purpose, the second fixing component 68 of the fixing device 66 has a master force device 11 for selectively exerting a magnetic master force on a fixing mechanism of the first fixing component 67, which is formed by the components 15, 16, 17. Thus, the fixing mechanism 15, 16, 17 by means of the master power device 11 for releasing and / or fixing the transported to the target surface 57 measuring probe 12 can be actuated. The fixing mechanism 15, 16, 17 has two magnetic elements 16, 17, the mutually repulsive magnetic interaction force is formed to fix the measuring probe 12 transported to the target surface 57 by clamping. The fixing device 66 also has a spherical holding force reinforcing element 15 with a spherically curved adhesive force transfer surface, which acts in a punctiform manner directly onto the measuring probe 12 in a state of the measuring probe 12 transported to the target surface 57 by means of the adhesive force transfer surface. Furthermore, according to FIG. 4A and FIG. 5, an insertion pocket 69 bounded on the upper side by the target surface 57 is provided, into which the measuring probe 12 is inserted when the measuring probe 12 rests on the target surface 57.
The fixing mechanism 15, 16, 17 has two magnetic elements 16, 17 designed here as permanent magnets (alternatively as electromagnets), which are arranged in a receiving cavity. A north pole of the respective magnetic element 16, 17 is designated "N" in the figures, whereas a south pole of the respective magnetic element 16, 17 is designated "S" in the figures. The two magnetic elements 16, 17 are arranged according to Figure 5 in the same of the two opposing fixing components 67, 68, namely in the fixing component 67. In the embodiment shown, the magnetic interaction force between the magnetic elements 16, 17 is formed so that in the insertion pocket 69 introduced measuring probe 12 in the insertion pocket 69 by this magnetic interaction force in the absence of a master force is clamped fixed (not shown). As can be seen from the designations S and N in FIG. 5, the two magnetic elements 16, 17 abut each other. Because of this repulsive magnetic interaction force, the magnetic elements 16, 17 act on the measuring probe 12 introduced into the insertion pocket 69 so that it is clamped in the insertion pocket 69. The magnetic element 17 is immovably mounted in the fixing component 67, for example glued there. The magnetic element 16, however, is movably mounted in the fixing component 67. Under the influence of the repulsive magnetic force, therefore, the magnetic element 16 is pressed in the direction of the receiving shaft of the insertion pocket 69 and thus exerts a fixing clamping force on the measuring probe 12. Advantageously, the insertion pocket 69 additionally has an optional and, in the exemplary embodiment shown, spherical or spherical holding-force reinforcing element 15. The adhesion-promoting element 15 acts as an intermediate or force transmitter between the magnetic element 16 and the measuring probe 12 inserted into the receiving shaft and thus presses in a introduced into the insertion pocket 69 state of the probe 12 with a spherically curved contact surface directly on the probe 12. The probe 12 is As a result, approximately punctiform acted upon by a strong clamping force.
Thus, according to FIG. 5, a direct magnetic clamping takes place using a repulsive magnetic force between the magnetic elements 16, 17. In this embodiment, the measuring probe 12 or the cantilever chip is likewise clamped between a contact plate 13 and the adhesion-promoting element 15. Adjacent to the movable magnetic element 16, the fixed magnetic element 17 is mounted, wherein the magnetic elements 16, 17 are oriented relative to each other so that the two magnetic elements 16, 17 repel.
The transport device 56 and the fixing device 66 can be set up to cooperate with each other such that the measuring probe 12 is first transported to the target surface 57 and is pressed against the target surface 57 during fixing. More precisely, by means of the transport device 56, the measuring probe 12 can be moved from the receiving surface 54 into the region of the target surface 57, so that the measuring probe 12 comes to lie in the region of the target surface 57, as shown in FIG touching contact. A clamping contact of the measuring probe 12 on the target surface 57 on the contact plate 13 can then be triggered by the fixing device 66 is activated by approaching the adhesion force enhancement element 15 to the measuring probe 12.
The clamping of the measuring probe 12 is released between the adhesion force enhancing element 15 and the contact plate 13 by imparting to the field of the fixed magnetic element 17 an oppositely oriented magnetic field which repels the movable magnetic element 16 from the measuring probe 12 and reduces the clamping force to a negligible level. In the embodiment shown, this is accomplished by the spatially movable and also designed as a permanent magnet master power device 11, which can be approximated to the magnetic elements 16, 17 to solve the clamping, or which can be removed from the magnetic elements 16, 17 to unhindered the clamping to act on the probe 12.
The magnetic field of the master power device 11 may advantageously be stronger than the magnetic field of the magnetic elements 16, 17. While the guide member 7 is folded to the transport module 1 in order to move the probe 12 between the receiving surface 54 and the target surface 57 remains Measuring probe 12 so at the fixing device 66 unclamped and can be moved freely. If, however, the pushed to the target surface 57 probe 12 are removed together with the transport module 1 of the handling device 50 and transported to the scanning probe microscope 81, only the guide member 7 needs to be folded down, whereby the probe 12 for transport to the scanning probe microscope 81 secured by the first fixing component 67 of the fixing 66 is clamped.
As can best be seen in FIG. 4 and FIG. 4A, the handling device 50 has the detachable transport module 1 having the target surface 57. The transport module 1, together with a measuring probe 12 transported from the receiving surface 54 to the target surface 57, can be separated from the rest of the handling device 50 and transported to the scanning probe microscope 81 (see FIG. 1).
The longitudinally displaceable (see double arrow 109) ramp 3 shown in Figure 4 and Figure 4A and shown in Figure 4 and Figure 4A and pivotable (see rotation arrow 110) guide member 7 are for engaging take the transport module 1 to the transport module 1 zoom. This operating state is shown in FIG. 4 and FIG. 4A. If, however, the guide member 7 is folded down by the transport module 1 by pivoting according to rotation arrow 110 and the ramp 3 is pushed away laterally by the transport module 1 according to double arrow 109, the transport module 1 is released from the rest of the handling device 50 and can then be removed from the handling device 50 and to the Scanning Probe Microscope 81 are coupled. After such a release, the measuring probe 12 then lies on the target surface 57 of the transport module 1, so that a user can comfortably transport the entire transport module 1 together with the measuring probe 12 to the scanning probe microscope 81 and mount it ready for operation there. The handling of small filigree parts by the user is thereby unnecessary.
Clearly, the receiving surface 54 is arranged in engaging the transport module 1 between the ramp 3 and the guide member 7. By contrast, when the transport module 1 is engaged, the target surface 57 is arranged between the transport module 1 and the guide part 7 (see FIG. 5). As can be seen in Figure 4A and Figure 5, the target surface 57 is inclined sloping with respect to a horizontal plane. Similarly, the receiving surface 54 and / or a guide surface, i. a bottom surface of channel 59, the guide structure 55 also be inclined sloping towards a horizontal plane to the insertion pocket 69 out. As a result, during transport, the measuring probe 12 can move downwards from the receiving surface 54 in the direction of the target surface 57 along a sloping surface, so that the installation of the measuring probe 12 in the transport module 1 takes place at an angle which corresponds to the final position of the measuring probe 12 in the transport module 1 and subsequently in scanning probe microscope 81.
FIG. 16 illustrates a locking mechanism 70 for preventing undesired movement of a component of the handling device 50, which is partially implemented in the ramp 3 and partially in adjoining components 4, 2 of the handling device 50. The undesired movement prevented by the locking mechanism 70 is one which would subject the boom 52 and / or the probe tip 85 to mechanical stress during movement of the ramp 3 relative to the adjacent components 4, 5.
The arrangement 71 according to FIG. 1 can be operated as follows:
First, the measuring probe 12 to be transferred to the scanning probe microscope 81 can be placed on the receiving surface 54 in the area between the ramp 3 and the guide part 7 of the handling device 50 and covered by the covering device 58, which may be part of the guide part 7.
Then, the probe 12 may be slid from the receiving surface 54 along the channel 59 of the guide structure 55 toward the target surface 57, which is accomplished by the feed slider 62. The assembly of components 4, 5, 6 is thereby moved to the left according to FIG. As a result, the measuring probe 12 is inserted into the insertion pocket 69 and is now in the area between the transport module 1 and the guide part 7.
Subsequently, the guide member 7 is folded away from the transport module 1, whereby the fixing device 66 is activated for fixing the probe 12 in the insertion pocket 69. Then the ramp 3 is moved away from the transport module 1. Thus, the transport module 1 is exposed for removal from the handling device 50.
The transport module 1 together with the measuring probe 12 fixed thereto can now be removed from the remainder of the handling device 50 and coupled to the transport module interface 72 of the scanning probe microscope 81. After this coupling, the scanning probe microscope 81 can be operated to determine surface information regarding a specimen 86 by scanning a surface of the specimen 86 by means of the measuring probe 12 in a scanning manner. After completion of this operation, the transport module 1 together with the measuring probe 12 can be removed again from the scanning probe microscope 81. Thereafter, the removed again transport module 1 together with it still fixed probe 12 can be moved back to the handling device 50 and placed between the ramp 3 and the guide member 7.
Subsequently, the ramp 3 is moved to the transport module 1 and folded the guide member 7 to the transport module 1 under simultaneous solution of the clamping of the probe 12. Namely, by the folding, the fixing device 66 for releasing the previously fixed measuring probe 12 in the
Insertion pocket 69 triggered and the transport module 1 mounted on the handling device 50.
Now, the assembly can be moved from the components shown in Figure 1 by reference numeral 4, 5, 6 according to Figure 1 to the left. By actuating the actuating device 6, the hook 5 'of the discharge slide 63 snaps onto the measuring probe 12. Thereafter, the assembly can be moved from the components shown in Figure 1 with reference numerals 4, 5, 6 according to Figure 1 to the right, whereby the hook 5 'the Abführschiebers 63 pushes the probe 12 to the right or tow. When the measuring probe 12 reaches the receiving surface 54, the release nose 5 "moves out of the depression 3 ', whereby the hook 5' releases the measuring probe 12 and deposits it in the region of the receiving surface 54. The measuring probe 12 is therefore in its original starting position in FIG Area between the ramp 3 and the guide member 7 and can be easily removed from the handling device 50 by a user, for example, with tweezers or the like.
Hereinafter, construction and operation of the handling device 50 will be described in more detail.
The basic structure of the handling device 50 or cantilever changing apparatus is shown in FIG. The cantilever module or transport module 1 is inserted into a base plate 2 of the changing apparatus or handling device 50. On this base plate 2 sits the slidably arranged ramp 3, which can be locked by means of a double button mechanism 10, 10 'in two end positions. The one end position, which is not shown in the figure, is that in which the transport module 1 can be inserted or removed from the handling device 50. In the other end position illustrated in FIG. 5, the installation or removal of the measuring probe 12 into or out of the transport module 1 is possible. The lateral guidance of the ramp 3 is achieved with an adjustable bar 9.
On the top of the ramp 3 is also slidably disposed (see double arrow 112) of the carriage 4, which receives the spring tongue 5 with the here formed as an actuating button actuator 6. The spring tongue 5 serves to remove the measuring probe 12 from the transport module 1.
The guide member 7, which can be folded by means of a double hinge 8 from the working position on the handling device 50 in the position for insertion / removal of the transport module 1, has several functions, which are shown in more detail in Figure 5. On the one hand, when folding into the working position with the aid of one or more built-in magnets of the master power device 11, the above-described fixing device 66 or clamping device for clamping the measuring probe 12 in the insertion pocket 69 is actuated, which essentially consists of the contact plate 13, a probe holder 14, a pressure ball as a holding force enhancing element 15 and the magnetic elements 16, 17 is formed. In other words, when folding the guide member 7 in the working position, the clamping device is actuated such that a dissolved state of the measuring probe 12 is turned on.
An upper bound of the channel 59 for guiding the cantilever chip, i. the measuring probe 12, in the guide part 7 is formed by regions 18, wherein there provided a groove portion or an exemption 61 causes the sensitive probe tip 85 does not come into contact with the guide member 7.
Another function of the guide member 7 is the fixation of the ramp 3 in working position, i. the ramp 3 can not be pushed back with folded guide part 7. This prevents damage to the transport module 1 or the measuring probe 12.
FIG. 6 and FIG. 7 show the arrangement of the components which serve to pull out the cantilever chip or the measuring probe 12 from the cantilever module or transport module 1. The spring tongue 5 is rotatably mounted in the carriage 4 and can be pressed by means of the actuator 6 to stop (not shown) down. For ease of use, the key is mechanically coupled to a snap-action disc 19 (see FIG. 6). In this way, a user receives a haptic and / or acoustic feedback when he has successfully pushed the button of the actuator 6.
Advantageously, the spring tongue 5 has the Abführschiebers 63 on its underside a needle-shaped, flexible extension or hook 5 ', which is formed at its front end as a tow hook and thus the probe 12 can engage the back 103. The very low stiffness of the needle has the consequence that, when the button of the actuator 6 is pressed, a maximum force of less than IN acts on the holder 14, in particular referred to as cantilever holder, or on the measuring probe 12 and thus no damage occurs.
In Figure 7, the depressed and already hooked position of the spring tongue 5 is shown by dashed lines. The hooking on the probe 12 happens automatically after pressing the actuator 6, when carriage 4 is moved away from the front end position. At the same time, the release lug 5 "of the spring tongue 5 dips into a longitudinal groove or depression 3 'of the measuring probe channel of the ramp 3. The release lug 5" serves to prevent the measuring probe 12 from retracting or extending the slide 4 at a defined change position without Release the button of the actuator 6 is released and comes to a standstill, even if the carriage 4 is moved to its rear stop on. The release of the probe 12 is accomplished by lifting the flexible needle in the form of the hook 5 'due to the leakage of the release lug 5 "in the groove runout area of the recess 3' of the ramp 3. Moreover, the geometry of the hook 5 'on the underside is configured in that, when the carriage 4 is moved in by accidentally pressing the actuating device 6, no damage occurs to the holder 14 or the contact plate 13. The bevel slides over the edge of the holder 14 or contact plate, bending the hook 5 'designed as an elastic needle 13 away.
With the described handling device 50, a controlled guidance of the measuring probe 12 is made possible so that the measuring probe 12 is not damaged during the exchange.
The tool in the form of the handling device 50 advantageously allows a predominantly positive guidance for the measuring probe 12 in all spatial directions. In combination with exemptions 61 (see FIG. 9 and FIG. 12), which prevent contact between the arm 52 and the probe tip 85 even when the probe 12 is guided in the channel 59 by means of the slides 62, 63, it is not necessary to clamp or affix it to a support , The guidance of the measuring probe 12 is accomplished by the guide structure 55, which defines the channel 59, in which the two slides 62, 63 of the transport device 56 are accommodated. The channel 59 is, as shown in Figure 9, formed of two pairs of opposite guide surfaces, on the one hand, the side surfaces and on the other bottom and top (see walls 60). The top wall 60 has a relief 61 which ensures that the boom 52 and the probe tip 85 themselves can not be touched. As a result of this configuration, the freedom of movement of the measuring probe 12 is essentially limited to a displacement in the longitudinal direction of the channel 59.
The feed slider 62 formed as a front slider contacts the probe 12 on the front side 102 and is used to displace the probe 12 in the longitudinal direction of the channel 59. As with the guide surface on the top or top wall 60 of the channel 59, the feed slider 62 is provided in the middle with release 61 to ensure that the probe 12 can be touched without damaging the cantilever 52 including the probe tip 85 itself. The front slider or feed pusher 62 is used when it comes to inserting the probe 12 into the clamp, i. the insertion pocket 69 with the fixing device 66 acting there.
When the measuring probe 12 is to be removed again from this clamping device, the discharge slide 63 designed as a rear slide is used. This touches the probe 12 at the boom 52 together
The Abführschieber 63 can be designed with advantage narrow in a direction of the channel 59 perpendicular to a respective displacement direction 107, 108, since the contact plate 13 is provided in the clamping device with a completely continuous slot to the Abführschieber 63 space to offer. This slot should in turn be as narrow as possible in order to be able to save the discharge slide 63 in a space-saving manner.
The two slides 62, 63 together limit the mobility of the probe body 51 in the longitudinal direction of the channel 59. Thus, the freedom of movement of the probe 12 is limited to purely positive fit so far that a contact between the boom 51 together with the probe tip 85 and surrounding structure is impossible and the measuring probe 12 can be moved securely and guided in a spatial direction of the longitudinal direction of the channel 59.
Following this concept, when using the handling device 50, the measuring probe 12 is placed on a structure in the form of the receiving surface 54, which is formed as at least one of the surfaces of the channel 59. Thereafter, the channel 59 with the cover 58, similar to a lid, completed. Subsequently, the measuring probe 12 is inserted into the fixing device 66 at the insertion pocket 69 using the feed slider 63. The fixing device 66 is unlocked in this operating state.
For removal-preferably but not necessarily-the fixing device 66 is unlocked and the measuring probe 12 is pulled back into the channel 59 by means of the discharge slide 63. After removing the covering device 58, the measuring probe 12 can be removed.
The respectively unneeded of the two slides 62, 63 can preferably be moved parallel to the slider 62, 63 being used, in order to leave the measuring probe 12 no free space for an undesired movement.
As an alternative to the embodiment described above, individual boundary surfaces or walls 60, which form part of the channel 59 in the embodiment described above, may also be part of one or both of the slides 62, 63. For example, in FIG. 8 and FIG. 14, a discharge slide 63 can be seen, which also takes over the guidance of the upper side of the measuring probe 12.
In order to prevent damage to the clamping device or fixing device 66 on the one hand and the measuring probe 12 on the other hand, a coupling can be implemented between the user-touchable operating element (see operating device 6) and the sliders 62, 63, only forces of harmless size (in particular only forces below a predefinable threshold) transmits. Clearly, regardless of a force exerted by a user (see finger 111), only a maximum of a prescribable maximum value of the force is transmitted, so that no damage to the precision mechanics can occur. In this regard, reference is made to FIG. 8 and FIG.
In the following, a compensation of tolerances in the mechanical design between the handling device 50 and a scanner of the scanning probe microscope 81 according to an exemplary embodiment of the invention will be described.
To ensure the function of the handling device 50 as a cantilever changing device in combination with each cantilever module or transport module 1, narrow tolerances can be ensured both in the handling device 50 and in the transport module 1.
With ramp 3 pushed up to the transport module 1, i. Handling device 50 in the working state, it should be ensured that the probe 12, without tilting, pushed by the channel 59 in the ramp 3 in the holder 14 on the transport module 1 and from there without obstruction by protruding edges, surfaces, etc. also pulled out again can.
An advantageous feature in this context is the remaining gap between the holder 14 and the ramp 3 when pushing the ramp 3 to the transport module 1 (see FIG. 7). If the gap is too large, there is a risk that the measuring probe 12 will tilt, which may lead to damage. If there is no gap, then the ramp 3 can possibly damage the transport module 1 when pushed on.
For these reasons, the ramp 3 can advantageously be provided with an adjustable stop 20, not visible to the user or not accessible to the user, shown in FIG. 16, which is adjusted once with the aid of an adjusting unit in the course of assembly of the handling device 50. The remaining gap may for example have a size of about 0.1 mm or be set to this size.
The transverse orientation of the transport module 1 relative to the handling device 50 takes place by inserting the transport module 1 along a dovetail guide to the attacks on a rear stop in the form of the bar 9 on the base plate 2. The bar 9 also adopts the exact lateral guidance of the ramp 3 when pushing the transport module 1.
As a further advantageous feature, inlet areas of the holder 14 and the channel 59 of the ramp 3 and of the guide part 7 are also provided with corresponding chamfers which prevent tilting of the measuring probe 12.
Hereinafter, a user-assisted mechanical design of the handling device 50 will be described, with assistance for the simplified and reproducible positioning of the measuring probe 12 by means of tweezers or other means. The changing apparatus in the form of the handling device 50 can be equipped with one or more features that allow the user a simple and safe operation. In Figure 16, one of these features is shown in detail.
In order to protect the probe 12 itself and the transport module 1 from damage, it should be avoided to move the ramp 3 to the rear, when the carriage 4 is in that position, from the - seen in the insertion direction - an engagement of the probe 12 moving Parts feeding slide 62 and sliding needle (not shown in Figure 16) or spring tongue 5 of the discharge slide 63 takes place.
A corresponding mechanical lock the movement of the ramp 3 in response to the position of the carriage 4 can be accomplished by means of locking pins 21, thrust pieces 22 and springs 23. The movement of the pressure pieces 22 via a gate area 4 'of the carriage 4 and causes the locking pin 21 dips into a bore 2' in the base plate 2 and thus fixes the ramp 3.
When the carriage 4 is pushed forwards from the position shown in Fig. 16 (i.e., to the left in Fig. 16) and thus the measuring probe 12 is moved into the transporting module 1, the locking of the ramp 3 is maintained. If the carriage 4 is moved in the opposite direction (ie to the right according to FIG. 6), the parts moving the measuring probe 12 are not engaged, the gate geometry causes the gate area 4 'and the force of the springs 23, that the locking pin 21 the bore 2 'pushed out and subsequently the displacement of the ramp 3 in the direction of the rear end position is made possible.
Another feature for protecting the probe 12 and the transport module 1 is that the transport module 1 can only be inserted into or removed from the handling device 50 when the ramp 3 is in the rear end position. This property can be effected on the one hand by the shaping of the upper side of the transport module 1 and on the other hand by the geometry of the underside of that region of the ramp 3 which is located above the transport module 1 (not shown in the figure).
According to one embodiment, the handling device 50 or the exchange device can be actuated electrically, pneumatically, etc., preferably motorized. The handling device 50 can be implemented separately or as an extension unit of a scanning probe microscope 81.
FIGS. 17 to 20 show a handling device 50 according to an exemplary embodiment of the invention in different operating states while carrying out a method for handling a measuring probe 12 of a scanning probe microscope 81 by means of the handling device 50 shown.
FIG. 17 shows how a user has folded down the guide part 7 and pushed back the ramp 3 and is inserting the transport module 1 into the handling device 50.
FIG. 18 shows how a user attaches a measuring probe 12, which has been held with tweezers 113, to a receiving surface 54 of the handling device 50.
FIG. 19 shows how the user has pushed the ramp 3 up against the transport module 1 and the guide part 7 swings open onto the transport module 1. Subsequently, the carriage 4 can be moved from right to left and back again. As a result, in the interior of the handling device 50, as described in greater detail above, the measuring probe 12 is moved by means of the guide structure 55 and the transport device 56 and the fixing device 66 to the target surface 57 on the transport module 1.
FIG. 20 shows how the user subsequently folded down the guide part 7 and moved the ramp 3 away from the transport module 1 again. The transport module 1 with the measuring probe 12 clamped thereon can now be removed as a whole from the handling device 50 and brought to a scanning probe microscope 81.
In addition, it should be noted that "having" does not exclude other elements or steps, and "a" or "an" does not exclude a multitude, and it should be noted that features or steps associated with
Reference to one of the above embodiments may also be used in combination with other features or steps of other embodiments described above. Reference signs in the claims are not to be considered as limiting.

权利要求:
Claims (40)
[1]
1. Handling device (50) for handling a measuring probe (12) of a scanning probe microscope (81), wherein the measuring probe (12) has a probe body (51) and a by means of a cantilever (52) coupled to the probe body (51) probe tip (85) wherein the handling device (50) comprises: a receiving device (53) for receiving the measuring probe (12) on a receiving surface (54); a guide structure (55) in which the measuring probe (12) can be guided while the probe body (51) is delimited at least partially and the cantilever (52) and the probe tip (85) are mounted without contact; a transport device (56) for transporting the probe (12) from the receiving surface (54) along the guide structure (55) to a target surface (57).
[2]
2. Handling device (50) according to claim 1, comprising a covering device (58) for placing on the receiving device (53) for covering the measuring probe (12).
[3]
3. Handling device (50) according to claim 1 or 2, wherein the guide structure (55) has a channel (59) at least in sections between the receiving surface (54) and the target surface (57), along which channel (59) the measuring probe (12). is feasible.
[4]
4. Handling device (50) according to claim 3, wherein the channel (59) by means of top and / or bottom and / or side walls (60) is delimited.
[5]
5. Handling device (50) according to claim 4, wherein the probe tip (85) facing wall (60) has a free position (61) for the free release of the boom (52) and the probe tip (85).
[6]
6. Handling device (50) according to one of claims 1 to 5, wherein the transport device (56) for transporting the measuring probe (12) from the target surface (57) along the guide structure (55) back to the receiving surface (54) is formed.
[7]
7. Handling device (50) according to one of claims 1 to 6, wherein the transport device (56) has a feed slide (62) for pushing the measuring probe (12) at least in sections from the receiving surface (54) to the target surface (57).
[8]
8. Handling device (50) according to claim 7, wherein the feed slide (62) has an opening (61) for the free release of the boom (52) and the probe tip (85), if by means of the feed slide (62), the measuring probe (12) at least is pushed in sections from the receiving surface (54) to the target surface (57).
[9]
9. Handling device (50) according to one of claims 1 to 8, wherein the transport device (56) has a discharge slide (63) for pushing the measuring probe (12) at least in sections from the target surface (57) back to the receiving surface (54).
[10]
10. Handling device (50) according to claim 9, wherein the Abführschieber (63) for acting only on the probe body (51) of the measuring probe (12) is formed when by means of Abführschiebers (63), the measuring probe (12) at least partially from the target surface (57) is pushed back to the receiving surface (54).
[11]
11. Handling device (50) according to claim 9 or 10, wherein the Abführschieber (63) has a spring tongue.
[12]
12. Handling device (50) according to one of claims 9 to 11, wherein the Abführschieber (63) when moving on the measuring probe (12) acting hooks (5 ') and one with the hook (5') coupled and when moving in a Recess (64) has immersed release lug (5 "), which is led out on reaching the receiving surface (54) by the measuring probe (12) due to the displacement of the recess (64), whereby the hook (5 ') the measuring probe (12) releases.
[13]
13. Handling device (50) according to claims 7 and 9, wherein the Abführschieber (63) perpendicular to a sliding direction (107, 108) is narrower than the Zuführschieber (62).
[14]
14. Handling device (50) according to one of claims 1 to 13, comprising an actuating device (6) for actuating the transport device (56) by a user or by a drive device, in particular a motor.
[15]
15. Handling device (50) according to claim 14, wherein the actuating device (6) has a force limiting mechanism (65) for limiting a force exerted by a user on the actuating device (6) in such a way that a force acting on the transport device (56) is predeterminable Threshold does not exceed.
[16]
16. Handling device (50) according to claim 14 or 15, wherein the actuating device (6) is designed such that a displacement of the transport device (56) by means of actuation of the actuating device (6) selectively enables or impossible.
[17]
17. Handling device (50) according to one of claims 1 to 16, comprising a target surface (57) exhibiting transport module (1), in particular together with a measuring probe (12) on the target surface (57), from the rest of the handling device (50). separable and transportable to the scanning probe microscope (81).
[18]
18. Handling device (50) according to claim 17, comprising a movable ramp (3) and a movable guide part (7) which can be moved to engage the transport module (1) to the transport module (1) and the transport module (1) releasing from the transport module (1) are movable away.
[19]
19. Handling device (50) according to claim 18, wherein the receiving surface (54) when engaging the transport module (1) between the ramp (3) and the guide part (7) is arranged.
[20]
20. Handling device (50) according to claim 18 or 19, wherein the target surface (57) is arranged in engagement of the transport module (1) between the transport module (1) and the guide part (7).
[21]
21. Handling device (50) according to one of claims 1 to 20, comprising a fixing device (66) for selectively fixing the measuring probe (12) to the target surface (57).
[22]
22. Handling device (50) according to claim 21, wherein the fixing device (66) has a first fixing component (67) in the region of the target surface (57) and a second fixing component (68) which is fixed for switching between one on the target surface (57) Condition of the measuring probe (12) and one of the target surface (57) dissolved state of the measuring probe (12) selectively from the target surface (57) wegbewegbar or to the target surface (57) is formed zoomed.
[23]
23. Handling device (50) according to claim 22, wherein the fixing device (66) is set up to switch on by means of the movement of the second fixing component (68) the state of the measuring probe (12) released from the target surface (57).
[24]
24. Handling device (50) according to claim 22 or 23, wherein the fixing device (66) is arranged to switch on by means of moving away the second fixing component (68) fixed to the target surface (57) state of the measuring probe (12).
[25]
25. The handling device according to claim 21, wherein the fixing device comprises: a master power device for selectively exerting a master force on a fixing mechanism; the fixing mechanism (15, 16, 17), which can be actuated by means of the master power device (11) for releasing and / or fixing the measuring probe (12) transported to the target surface (57).
[26]
26. Handling device (50) according to claim 25, wherein the master power device (11) is selected from a group consisting of a master force device for exerting a magnetic master force, in particular can be applied by means of a movable master force permanent magnet or by means of an electrically activatable master force electromagnet, a hydraulic master force, a pneumatic master power, a master electric power, a thermal master power and a mechanical master power.
[27]
27. Handling device (50) according to claim 25 or 26, wherein the fixing mechanism (15, 16, 17) has at least two magnetic elements (16, 17) whose magnetic interaction force is formed, the measuring probe (12) transported to the target surface (57). to fix, in particular to fix by clamping.
[28]
28. Handling device (50) according to one of claims 21 to 27, wherein the fixing device (66) has a holding force reinforcing element (15) with a curved, in particular spherically curved, adhesive force transfer surface, which is transported to the target surface (57) in a state of the measuring probe (12 ) acts by means of the adhesive force transfer surface, in particular punctiform, directly on the measuring probe (12).
[29]
29. Handling device (50) according to one of claims 21 to 28, wherein the transport device (56) and the fixing device (66) are arranged to cooperate with each other such that the measuring probe (12) is first transported to the target surface (57) and only is fixed to the target surface (57) during fixation, in particular only when it is pressed against the target surface (57) is pressed to form a physical contact.
[30]
30. Handling device (50) according to one of claims 1 to 29, comprising a portion of the target surface (57) limited insertion pocket (69) into which the measuring probe (12) is at least partially inserted when the measuring probe (12) on the target surface (57).
[31]
The handling device (50) according to any one of claims 1 to 30, wherein at least one of the group consisting of the receiving surface (54), a guide surface of the guide structure (55), and the target surface (57) is opposed to a horizontal plane is formed inclined surface, in particular such that the measuring probe (12) moves during transport from the receiving surface (54) to the target surface (57) at least partially down the inclined surface.
[32]
32. Handling device (50) according to one of claims 1 to 31, comprising a locking mechanism (70) for preventing movement of at least one component (3, 4) of the handling device (50), which movement the boom (52) and / or the probe tip (85) and / or the insertion pocket (69) would be subjected to a mechanical load.
[33]
33. Arrangement (71), comprising: a scanning probe microscope (81) for determining surface information regarding a specimen (86) by scanning a surface of the specimen (86), wherein the scanning probe microscope (81) has a measuring probe (12), the scanning the surface of the specimen (86) is arranged and a probe body (51) and a by means of a cantilever (52) coupled to the probe body (51) probe tip (85); a handling device (50) according to any one of claims 1 to 32 for handling the measuring probe (12).
[34]
34. Arrangement (71) according to claim 33, wherein the scanning probe microscope (81) has a transport module interface (72) for coupling a transport module (1) according to one of claims 17 to 20 such that after coupling the transport module (1) to the Transport module interface (72) the measuring probe (12) on the transport module (1) is ready for scanning scanning of the surface of the specimen (86).
[35]
35. Arrangement (71) according to claim 33 or 34, wherein the scanning probe microscope (81) is designed as an atomic force microscope.
[36]
36. A method for handling a probe (12) for a scanning probe microscope (81), wherein the probe (12) has a probe body (51) and a by means of a cantilever (52) coupled to the probe body (51) probe tip (85), wherein the method comprises: receiving the measuring probe (12) on a receiving surface (54) of a handling device (50); Guide the probe (12) in the handling device (50) such that the probe body (51) is at least partially bounded by a guide structure (55) and the cantilever (52) and the probe tip (85) in the guide structure (55) stored without contact become; Transporting the measuring probe (12) in the handling device (50) from the receiving surface (54) along the guide structure (55) to a target surface (57).
[37]
37. The method according to claim 36, wherein after transporting the method comprises: separating a transport module (1) having the target surface (57) together with a measuring probe (12), in particular fixed to the target surface (57), from the rest of the handling device (50); and coupling the transport module (1) together with the measuring probe (12) located at the target surface (57) to the scanning probe microscope (81).
[38]
38. The method of claim 37, wherein after coupling, the method comprises operating the scanning probe microscope (81) to determine surface information regarding a specimen (86) by scanning a surface of the specimen (86) by scanning probe (12).
[39]
39. The method according to claim 37 or 38, wherein the method comprises: separating the transport module (1) together with the measuring probe (12) from the scanning probe microscope (81); and re-coupling the transport module (1) together with the measuring probe (12) to the handling device (50).
[40]
40. The method of claim 39, wherein the method comprises transporting the probe (12) in the handling device (50) from the target surface (57) along the guide structure (55) back to the receiving surface (54).

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同族专利:

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公开号 | 公开日

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DE112018005111A5|2020-08-27|

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KR20200055001A|2020-05-20|

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CN111133319A|2020-05-08|

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WO2019053153A1|2019-03-21|

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AT520313B1|2019-03-15|

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US11022786B2|2021-06-01|

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US20200326518A1|2020-10-15|

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法律状态:

优先权:

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申请号 | 申请日 | 专利标题

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ATA50765/2017A|AT520313B1|2017-09-13|2017-09-13|Handling device for handling a measuring probe|ATA50765/2017A| AT520313B1|2017-09-13|2017-09-13|Handling device for handling a measuring probe|

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CN201880059268.9A| CN111133319A|2017-09-13|2018-09-13|Handling device for handling a measuring probe|

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KR1020207009303A| KR20200055001A|2017-09-13|2018-09-13|Handling device for handling measuring probes|

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PCT/EP2018/074795| WO2019053153A1|2017-09-13|2018-09-13|Handling device for handling a measuring probe|

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DE112018005111.0T| DE112018005111A5|2017-09-13|2018-09-13|Handling device for handling a measuring probe|

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US16/646,844| US11022786B2|2017-09-13|2018-09-13|Handling device for handling a measuring probe|